Asyst Technologies, Inc. v. Empak, Inc.

268 F.3d 1364, 2001 WL 1191523
CourtCourt of Appeals for the Federal Circuit
DecidedOctober 10, 2001
DocketNo. 00-1514
StatusPublished
Cited by12 cases

This text of 268 F.3d 1364 (Asyst Technologies, Inc. v. Empak, Inc.) is published on Counsel Stack Legal Research, covering Court of Appeals for the Federal Circuit primary law. Counsel Stack provides free access to over 12 million legal documents including statutes, case law, regulations, and constitutions.

Bluebook
Asyst Technologies, Inc. v. Empak, Inc., 268 F.3d 1364, 2001 WL 1191523 (Fed. Cir. 2001).

Opinion

BRYSON, Circuit Judge.

Asyst Technologies, Inc., filed suit against Jenoptik AG and other parties (collectively, “Jenoptik”) in the United States District Court for the Northern District of California, charging Jenoptik with infringing Asyst’s U.S. Patent Nos. 4,974,166 (“the '166 patent”) and 5,097,421 (“the '421 patent”). On Jenoptik’s motion for summary judgment, the district court ruled that the accused device made by Jenoptik did not infringe the asserted claims of the '166 and '421 patents. On appeal, Asyst argues that the district court erred in its claim construction and infringement analysis. Because we conclude that the district court’s claim construction and analysis was flawed in certain respects and that summary judgment of noninfringement should not have been entered, we reverse the judgment and remand for further proceedings.

I

Asyst’s patents describe systems to be used in processing semiconductor wafers into integrated circuits. Wafer processing must occur in an ultra-clean environment in order to avoid manufacturing defects. One way to maintain an ultra-clean environment is to enclose the wafers in a sealed transportable container, also known as a “pod.” In the course of processing, human operators typically transport a batch of wafers in a pod through a series of process tools, or work stations, each of which performs a different process on the wafers. Unlike in a conventional assembly line, the wafers do not follow a single path from tool to tool. Rather, a batch of wafers may travel back and forth among various tools at different times, depending on the desired characteristics of the final integrated circuit.

During the manufacturing process, it is critical to provide routing information to the human operators and to verify that the correct wafer lot is at the right tool at the right time. The physical results of many processes performed by the tools are impossible to ascertain by sight, and if the wrong process is performed at the wrong time or in the wrong sequence, the wafers may be irreparably damaged. The verification process is commonly referred to as “lot validation,” and the patents in suit are directed at lot validation systems.

The patent claims generally relate to lot validation systems featuring microcomputers mounted on each pod. The microcomputers on the pods communicate with microcomputers located on each wafer processing tool. Each microcomputer has an associated communication device located on the respective pod or tool, and the microcomputers communicate through those devices. The preferred embodiment of the communication device features light emitting diodes and photosensitive transistors to transmit and receive signals between the microcomputers.

Before the district court, Jenoptik moved for summary judgment of non-infringement of independent claims 1 and 2 of the '421 patent, claims 1 and 5 of the '166 patent, and various asserted dependent claims. Jenoptik also moved for an order of summary judgment holding certain claims invalid.

The claims at issue in this case are reproduced below. Claims 1 and 2 of the '421 patent recite:

1. A processing system comprising:
(1) at least one transportable container for transporting articles to be processed;
(2) first two-way communication means mounted on said at least one transportable container;
(3) first microcomputer means mounted on said at least one transportable container for receiving and processing [1367]*1367digital information communicated with said first two-way communication means;
(4) storage means mounted on said at least one transportable container for storing digital information processed by said microcomputer means; and
(5) a plurality of work stations each respectively adapted to having said at least one transportable container re-movably mounted thereon and each respectively included mounted thereon,
(a) respective second two-way communication means adapted for two-way communication with said at least one transportable container when said container is mounted on the respective work station therewith, and
(b) respective second microcomputer means for receiving and processing digital information communicated with said respective second two-way communication means mounted on the respective work station therewith.
2. An inventory management system comprising:
(1) At least one transportable container for transporting articles, said at least one container including mounted thereon,
(a) first two-way communications means,
(b) first microcomputer means for receiving and processing digital information communicated with said first two-way communication means, and
(c) storage means for storing digital information processed by said microcomputer means;
(2) a plurality of respective sensing means for sensing the presence of said at least one transportable container, each respective sensing means including respective second two-way communication means adapted for two-way communication with said first two-way communication means;
(3) selection means for selecting between respective sensor means of said plurality;
(4) central processor means coupled to said selection means for receiving digital information from and for providing digital information to respective two-way communication means of respective sensor means of said plurality.
Claims 1 and 5 of the '166 patent recite:
1. A system for performing a series of processing steps for an article, each processing step being performed at a corresponding workstation, comprising:
a transportable container for the article, said transportable container including:
first interface means for controlling access to the article in said transportable container, and
container data processing means for receiving, storing and transmitting data relating to the identity and processing history of the article;
second interface means, provided at each workstation, for interfacing with said first interface means;
workstation data processing means, provided at each workstation, for receiving data from and transporting data to said container data processing means, for processing the data received from said container data processing means, and for controlling said first and second interface means to permit access to the article in said transportable container based on a comparison of the processing history of the article and the identity of the workstation; and
central data processing means for receiving data from and transmitting [1368]*1368data to each of said container and workstation data processing means and for processing data received from each of said container and workstation data processing means.
5. A system for transporting and processing articles, comprising:

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Asyst Technologies, Inc. v. Empak, Inc.
268 F.3d 1364 (Federal Circuit, 2001)

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Bluebook (online)
268 F.3d 1364, 2001 WL 1191523, Counsel Stack Legal Research, https://law.counselstack.com/opinion/asyst-technologies-inc-v-empak-inc-cafc-2001.