Kawasaki Jukogyo Kabushiki Kaisha v. Rorze Corporation

District Court, N.D. California·Decided June 14, 2024·No. 5:22-cv-04947·Unknown

Opinion

KAWASAKI JUKOGYO KABUSHIKI Case No. 22-cv-04947-PCP KAISHA, Plaintiff, ORDER GRANTING MOTION TO DISMISS, DENYING MOTION TO v. STRIKE, AND GRANTING REQUEST RORZE CORPORATION, et al., Re: Dkt. Nos. 112, 113 Defendants.

In this patent case involving chipmaking robots, plaintiff Kawasaki Jukogyo Kabushiki Kaisha (Kawasaki Heavy Industries) challenges counterclaims and affirmative defenses asserted by plaintiff Rorze Corp. For the reasons set forth below, Kawasaki’s motion to dismiss Rorze’s counterclaims is granted but its motion to strike Rorze’s affirmative defense is denied. I. Background Semiconductor chips are created from thin wafers of crystalline silicon. The wafers need to be kept clean and free from interference during the chipmaking process. To accomplish this, wafers are transported in specialized pods as they move between the different pieces of equipment used throughout the process. These are called front opening unified pods, or FOUPs. At each processing station, a wafer transport pod docks to the station (a piece of enclosed manufacturing equipment called an equipment front end module or EFEM). Once the pod attaches, the wafers can be taken out of the pod and brought inside the processing station, where some step in the manufacturing process is then carried out. The sealed interior is kept clean using air filters and the like. The patents at issue in this case all relate to the robots that carry silicon wafers inside of them through the enclosed space to another part of the station for processing, and carry the wafer back to the pod once the manufacturing step is done so it can move to the next station. The robots addressed by the patents in this case have movable arms that pivot around a single fixed axis. Having a single pivot axis instead of another kind of mechanism (like one that slides throughout the enclosed processing space) reduces the amount of movement. This helps keep the wafers clean by minimizing the amount of dust that is scattered. These patents aim to increase the length of the robot’s arm while also making sure that the robot does not collide with other parts of the equipment. One component that poses a particular collision risk is called a FOUP opener. When a wafer transport pod docks to the processing station, this is the component that opens the corresponding doors of the pod and station, allowing the inside of the pod to be accessed from inside the processing station. The FOUP opener moves inside the interior of the processing station. Because both the FOUP opener and the robot arm can move within this shared space, there is a greater risk that the robot arm could accidentally hit the FOUP opener as opposed to something stationery, like the wall of the processing station. The patents aim to limit collisions by setting the maximum length of the robot arm such that, at least when the robot arm is in its collapsed state, the robot arm is not long enough to hit the FOUP opener, even while it is moving. * * * The following facts from the countercomplaint are taken as true in resolving this motion. Yasuhiko Hashimoto is a research and development engineer and longtime executive at Kawasaki. He is currently Kawasaki’s president. In July 2007, he applied as sole inventor for a U.S. patent based on an earlier July 2006 application for a patent in Japan. Kenji Noguchi, a Kawasaki patent engineer, helped with the application. Mr. Hashimoto and Mr. Noguchi made prosecution decisions for this application and directed Kawasaki’s patent prosecution counsel. This application ultimately became the ’782 U.S. patent, which was assigned to Kawasaki and is the parent patent for all of the reissue patents asserted in this case. The initial version of claim 1 in this patent application involved a “wafer transfer apparatus” that would transfer a wafer carried in a transport pod within an enclosed processing predetermined interval,” each with an opening for access. The front wall has a FOUP opener that can open and close the transport pod when it docks to the processing station. The “wafer carrying robot” is located inside the interior of the processing station (the “interface space”) and is set up to move wafers between the front and rear openings. The robot itself is fixed to the floor and rotates around a predetermined pivot axis. The robot arm is made up of several rotating “link members” which ultimately connect to a “robot hand” that can hold wafers. Like a human arm, these link members can either extend to increase reach or fold in on themselves to take up less space. Claim 1 then specifically explains how the dimensions of this robot arm should be set:

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Kawasaki Jukogyo Kabushiki Kaisha v. Rorze Corporation, (N.D. Cal. 2024).

Kawasaki Jukogyo Kabushiki Kaisha v. Rorze Corporation (Kawasaki Jukogyo Kabushiki Kaisha v. Rorze Corporation) — published by Counsel Stack Legal Research, free access to 12M+ legal documents.

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