Kawasaki Jukogyo Kabushiki Kaisha v. Rorze Corporation

District Court, N.D. California·Decided June 14, 2024·No. 5:22-cv-04947·Unknown

Opinion

1 2 3 4 UNITED STATES DISTRICT COURT 5 NORTHERN DISTRICT OF CALIFORNIA 6 7 KAWASAKI JUKOGYO KABUSHIKI Case No. 22-cv-04947-PCP KAISHA, 8 Plaintiff, ORDER GRANTING MOTION TO 9 DISMISS, DENYING MOTION TO v. STRIKE, AND GRANTING REQUEST 10 FOR JUDICIAL NOTICE RORZE CORPORATION, et al., 11 Re: Dkt. Nos. 112, 113 Defendants.

12 13 In this patent case involving chipmaking robots, plaintiff Kawasaki Jukogyo Kabushiki 14 Kaisha (Kawasaki Heavy Industries) challenges counterclaims and affirmative defenses asserted 15 by plaintiff Rorze Corp. For the reasons set forth below, Kawasaki’s motion to dismiss Rorze’s 16 counterclaims is granted but its motion to strike Rorze’s affirmative defense is denied. 17 I. Background 18 Semiconductor chips are created from thin wafers of crystalline silicon. The wafers need to 19 be kept clean and free from interference during the chipmaking process. To accomplish this, 20 wafers are transported in specialized pods as they move between the different pieces of equipment 21 used throughout the process. These are called front opening unified pods, or FOUPs. 22 At each processing station, a wafer transport pod docks to the station (a piece of enclosed 23 manufacturing equipment called an equipment front end module or EFEM). Once the pod 24 attaches, the wafers can be taken out of the pod and brought inside the processing station, where 25 some step in the manufacturing process is then carried out. The sealed interior is kept clean using 26 air filters and the like. 27 The patents at issue in this case all relate to the robots that carry silicon wafers inside of 1 them through the enclosed space to another part of the station for processing, and carry the wafer 2 back to the pod once the manufacturing step is done so it can move to the next station. 3 The robots addressed by the patents in this case have movable arms that pivot around a 4 single fixed axis. Having a single pivot axis instead of another kind of mechanism (like one that 5 slides throughout the enclosed processing space) reduces the amount of movement. This helps 6 keep the wafers clean by minimizing the amount of dust that is scattered. These patents aim to 7 increase the length of the robot’s arm while also making sure that the robot does not collide with 8 other parts of the equipment. One component that poses a particular collision risk is called a 9 FOUP opener. When a wafer transport pod docks to the processing station, this is the component 10 that opens the corresponding doors of the pod and station, allowing the inside of the pod to be 11 accessed from inside the processing station. The FOUP opener moves inside the interior of the 12 processing station. Because both the FOUP opener and the robot arm can move within this shared 13 space, there is a greater risk that the robot arm could accidentally hit the FOUP opener as opposed 14 to something stationery, like the wall of the processing station. The patents aim to limit collisions 15 by setting the maximum length of the robot arm such that, at least when the robot arm is in its 16 collapsed state, the robot arm is not long enough to hit the FOUP opener, even while it is moving. 17 * * * 18 The following facts from the countercomplaint are taken as true in resolving this motion. 19 Yasuhiko Hashimoto is a research and development engineer and longtime executive at 20 Kawasaki. He is currently Kawasaki’s president. In July 2007, he applied as sole inventor for a 21 U.S. patent based on an earlier July 2006 application for a patent in Japan. Kenji Noguchi, a 22 Kawasaki patent engineer, helped with the application. Mr. Hashimoto and Mr. Noguchi made 23 prosecution decisions for this application and directed Kawasaki’s patent prosecution counsel. 24 This application ultimately became the ’782 U.S. patent, which was assigned to Kawasaki and is 25 the parent patent for all of the reissue patents asserted in this case. 26 The initial version of claim 1 in this patent application involved a “wafer transfer 27 apparatus” that would transfer a wafer carried in a transport pod within an enclosed processing 1 predetermined interval,” each with an opening for access. The front wall has a FOUP opener that 2 can open and close the transport pod when it docks to the processing station. The “wafer carrying 3 robot” is located inside the interior of the processing station (the “interface space”) and is set up to 4 move wafers between the front and rear openings. The robot itself is fixed to the floor and rotates 5 around a predetermined pivot axis. The robot arm is made up of several rotating “link members” 6 which ultimately connect to a “robot hand” that can hold wafers. Like a human arm, these link 7 members can either extend to increase reach or fold in on themselves to take up less space. Claim 8 1 then specifically explains how the dimensions of this robot arm should be set:

9 [I]n a minimum transformed state where the robot arm is transformed 10 such that a distance defined from the pivot axis to an arm portion which is farthest in a radial direction relative to the pivot axis is 11 minimum, a minimum rotation radius R, as the distance defined from the pivot axis to the arm portion which is the farthest in the radial 12 direction relative to the pivot axis, is set to exceed 1/2 of a length B in the forward and backward directions of the interface space, the 13 length B corresponding to a length between the front wall and the rear 14 wall of the interface space forming portion, and is further set to be equal to or less than a subtracted value (B – L0) to be obtained by 15 subtracting a distance L0 in the forward and backward directions from the rear wall of the interface space forming portion to the pivot axis, 16 from the length B in the forward and backward directions of the interface space (i.e., B/2 < R ≤ B – L0). 17 18 In other words, when the robot arm is folded in on itself into its smallest possible state, the 19 maximum length between the arm’s pivot axis and its furthest point is R. The distance between the 20 pivot axis and the back wall is L0. And the front-back depth of the inside of the processing station 21 is B. According to this claim, R must be greater than half of B, but also less than the distance 22 between the pivot axis and the front wall (which is B – L0). (If R was longer than that, the arm 23 would not be able to rotate without hitting the front wall, even when collapsed). Claims 2–7 24 depended on claim 1, and claim 8 paralleled claim 1 but for a “substrate transfer apparatus” rather 25 than a “wafer transfer apparatus.” 26 In April 2010, the U.S. patent office provisionally rejected claims 1–8 of this application. 27 The office concluded that the claims were unpatentable over three earlier patents and other 1 Imahashi Kazunari (Pub. No. 2003-179120), another Japanese patent issued to Tokunaga Kenji 2 (Pub. No. 2003-45933), and a U.S. patent issued to Satish Sundar (Pub. No. 2005/158153, Patent 3 No. 7,226,269). According to the patent examiner, the Kazunari patent already taught “a wafer 4 transport with an interface space, FOUP opener, [and] wafer carrying robot with arm links and 5 drives.” The Kenji patent showed these same items, as well as “more detail of a FOUP opener.” 6 And the Sundar patent showed these same items with “4 FOUPs and the dimensional and length 7 requirements.” The examiner believed that the Kazunari patent already taught all of the claimed 8 limitations and relative dimensions set out in Mr. Hashimoto’s application. The examiner also 9 noted that “over the prior art … the only differences are dimensional optimization from routine 10 experimentation for a desired configuration of known items.” This rendered the application’s 11 claims “unpatentable” and “obvious” because a skilled artisan would know to try modifying the 12 inventions shown in these prior patents or could have achieved Mr.

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Kawasaki Jukogyo Kabushiki Kaisha v. Rorze Corporation, (N.D. Cal. 2024).

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